Dynamic Linear Dispense (DLD)

  • Dynamically dispense your material linearly in a precise and consistent way
  • Decrease chemical consumption by 50% or more
  • Achieve better coating uniformity
  • Allows programmed dispense, either center-to-edge or edge-to-center, in a straight line motion
  • Simplifies sequential developing and etching processes
  • Affordable, with no maintenance required
Linear Dispense on a Standard Process Chamber
See it in action: