Spin Coater Liner

23 Series Liner

Removable, reusable process chamber liner, made from FEP Teflon®.

  • 6 series — P/N 10011274
  • 23 series — P/N 11011159
  • 8 series — P/N 10011276, P/N 10011385 (4")
  • 15 series — P/N 10011278