Teflon Housing for Spin Coaters

The Best in Chemical Compatibility

These models have been precisely machined from solid virgin PTFE Teflon-NXT® or Dyneon™ TFM™. This semiconductor-grade material is nearly impervious to all chemical attack, and can operate at very high temperatures. The clear flat or dome-shaped lid is ECTFE. Only ECTFE coated 316 Stainless Steel screws are used in some non-wetted areas.

All of our TFM systems are considered metal-free and therefore compatible with all solvents, strong bases and acids — even HF, HBr, HCl, et al. If you intend to continuously, and for long periods of time, exceed 100°C in the process chamber, please indicate this requirement when specifying a system.

Near zero porosity means a glass-like finish and no chemical memory in the process chamber!

Teflon is a registered trademark of E. I. du Pont de Nemours and Company. Dyneon and TFM are trademarks of Dyneon, a 3M Company.
Teflon® Housing