|
Electrical:

- The spin housing is made from 100%
solid natural polypropylene or PTFE (electrically
non-conductive). The internal electrical chassis and motor are
connected to earth ground by way of the 3-pronged input power
plug. No exposed conductive metal passes through the housing,
therefore double insulating the operator against a possible
electrical hazard. A local circuit breaker will interrupt the
power if a current overload is detected and can be reset but not
over-ridden by the operator.
- The membrane switch panel is 5 VDC
logic level isolated below a grounded static drain grid. The
housing and panel material is completely resistant to nearly all
solvents including, but not limited to, Acetone, Toluene, TCE, MEK,
Methanol, IPA as well as KOH, H2SO4, HF, and HCl. Note: Bromine
and Fluorine can only be run in the PTFE model.
- Fully
encapsulated hardware for near-absolute corrosion
resistance
- The motor
speed is monitored
and when set speed can not be achieved (a jammed chuck) rotation
will be discontinued and a reason-specific error will be
displayed.
- All electrical devices that can be
certified, are UL, CSA, and CE marked.
- The motor seal is higher than the
door opening making it nearly impossible for liquid to damage
the internal components even if the spin processor's drain is blocked.
- An
adjustable down-flow drain and exhaust
is available to positively evacuate unwanted gases on a
continuous basis.
- All
systems have an interlocked Nitrogen/CDA purge in order to
continuously insure that no liquid remains in the
process chamber after use to harbor bacterial growth or produce
unwanted hazardous reactions.
NOTE: The spin processor is
not intended to be liquid-tight and will present an electrical
hazard if submerged. The processor must not be located near an open
sink where it can be inadvertently knocked into a liquid bath.
Operation:
- A door interlock ensures that rotation
and automatic chemical dispensing cannot take place with the
door open. A wide lip on the inside bottom of the door routes
fluids spun off the wafer to the rear (directly into the drain),
while an overlapping shield stops leaking across the door
opening.
- A vacuum wafer hold-down interlock
prevents process initiation. The chuck must remain at 0 RPM for one
second before vacuum can be discontinued. This prevents the
accidental release of a wafer while spinning as well as
chemicals being dispensed into the vacuum system. Note: Some
systems do not have vacuum hold-down using various mechanical
retention techniques instead.
- If the programmed speed is not
reached within a predetermined period of time the program will
discontinue and indicate that a fault has occurred. This
prevents mechanical intervention by the operator (as in brushing
the top of a substrate or restricting it in some way from
rotating).
Pressure vessels, valves &
fittings:
- We only supply ASME rated
or other 3rd party tested (at least 160 PSI)
pressure vessels for chemical dispensing. See manufacturers
information plate on each vessel for more details. The intended
maximum dispense pressure is < 40 PSI.
- All Teflon dispense valves,
flair or compression type (gripper-ferrule) fittings and supply tubing supplied
are all rated to at least 150 PSI. LTC supplies all these
properly labeled components so that nothing can be compromised
during installation of the equipment.
General comment:
- We would appreciate any
constructive comment both having to do with operation and safety
of our equipment. If you find anything inconsistent or unsafe,
now or in the future, please bring it to our attention
immediately.
- We now have more than
7,000
systems installed worldwide and have yet to have one safety
issue in 22 years of operation. We remain eternally vigilant to this
very important issue!
|