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6/28/10 – NEW RELEASE – Spin 3000 software ver. 1.05.04
Improves uploading of programs from the controller to a PC.
6/28/10 – POROUS CHUCK USERS:
Do not soak the chuck in acetone, NMP, or similar solvent. The chuck should only be cleaned by wiping with solvent.
5/25/10 - NOW AVAILABLE - Newest firmware version for Spin 3000/650 controller
Ver. 47000022H is available
This new firmware:
Fixes intermittent motor slow-to-rotate (several minutes) when lid is opened after a single-step program runs its course.
Other firmware revisions address:
An unexpected activation of the CDA interlock with "Loss CDA" error.
An unexpected turn off of the vacuum and the inability to actuate vacuum when using the vacuum switch.
A very slow deceleration rate for 650(H)(z)(High performance drive motors) if the default program step is used as the last step (00.01.00 time; 00000rpm: 00002 acceleration) or when the programmed time completes with a very slow acceleration rate on the last step.
A motor acceleration condition when transitioning from maximum spin speed (12,000rpm capable systems only) to a very slow spin speed when using the 650SZ model with the standard drive motor. A work around without using the new firmware version is to transition from the max spin speed to an intermediate one before going to very slow spin speed. For example, when transitioning from 12,000 rpm to 200 rpm, first transition from 12,000 rpm to 6,000 rpm, and then to 200 rpm.
1/4/10 - PROCESS QUESTION - Note to customer regarding uniformity tolerance
Question: Does Laurell quote a uniformity tolerance for its spin processors?
Answer: We do not quote a uniformity tolerance for our spin coaters. We have many customers, in academia and industry, who are spin coating many different materials using our spin processors. Uniformity is not just a function of the processor itself. Uniformity is the result of understanding and controlling all the variables that occur during and after the coating process. As the process engineer or researcher, you need to develop a coat recipe that works well with your material.
The viscosity of your material will dictate the structure of your program, e.g., if it is thin material, dispense spin speed may be faster than it would be for thick material. Dispense technique will also impact uniformity. Are you using static dispense or dynamic dispense? If dynamic dispense is being used, how is the material being applied to the substrate? What is the distance between the nozzle and the substrate? What is the size of the nozzle? Is the nozzle clean? Is the chuck level? Is the room environment controlled (i.e., temperature, humidity, air flow, exhaust, etc.)? What is the temperature uniformity of your hot plate or oven? This is just a small sample of the many variables that affect coating uniformity.
As an example of what you can achieve with proper programming, control, and set-up, a professor at a major U.S. university was able to achieve 80Å uniformity across a 100mm Si wafer with 1-2µm of photoresist.
Our tool can achieve excellent uniformity with the proper understanding and execution of spin coating.
7/1/09 - EQUIPMENT TIP - For all EDC models - Upper housing adjustment
If the lid (upper housing) slowly drops down while in the open position, contact support for guidance in making the needed adjustments.
1/7/09 - NOW AVAILABLE - Redesigned diffuser valve stem - P/N 11010548 Rev. B
This redesign addresses:
Improved dome rinsing and clearing.
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