H6-15 Spin Coater

The New Laurell H6-15 spin coater is compact, packed with advanced features, and designed to the be the easiest spin coater to install in your glove box. This 650-series HL coater system will accommodate up to ø300mm wafers and 9" × 9" (229mm × 229mm) substrates, and features a maximum rotational speed of 12,000 RPM (based on a ø100mm silicon wafer).

Available Options

spin coater chuck Chucks and Adapters: Most Laurell Spin Coaters come standard with a vacuum chuck and fragment adapter. There are also thousands of other standard and custom chucks or adapters to choose from.  Details

Seismic Mounting: Features an earthquake-proof base mounting.  Details

spin coater linerLiners: Removable, reusable process chamber liners, made from FEP Teflon®, are available for every model, and one is included with every HL Series Spin Coater.

Teflon® Housing: Substitute NPP with Teflon® for use with processes that require chemistry to be dispensed at elevated temperatures.  Details

spin coater high performance drive High-Performance Drive: up to 12,000 RPM (depending upon the controller, chuck material, substrate size and mass). For specifics, see: Details

spin coater integrated vacuum generatorIntegrated Variable Pneumatic Vacuum Generator (IV-PVG): no moving parts, easy to clean. For specifics, see: Details

spin coater exhaust and drain optionsExhaust and Drain Options: All Laurell systems can be customized with a variety of exhaust and drain options.  Details

spin coater wafer alignment toolWafer Alignment Tools: Laurell's proprietary wafer alignment tools can be used to effortlessly center wafers on vacuum chucks.  Details

H6-15 Spin Coater Specifications
All HL Series systems include a wireless tablet featuring the exclusive Laurell Touch process control software.

With the use of its accompanying PC software, Spin 3000, it achieves nearly unheard of flexibility both in process definition and use. This wireless controller allows operator interaction in real-time, from anywhere in the lab, during process execution — including pausing time, stopping and continuing on from that point. The system can and will be continually updated easily and quickly in the field with downloadable firmware revisions. (We plan ahead at Laurell!)

Researchers worldwide have developed unique processes which will ONLY run with the level of control sophistication we offer. The HL Series controller can also be used in conjunction with a PC with Spin 3000, Laurell's exclusive process management software. However, this is NOT required to program or run the equipment.

The use of a PC adds the ability to record a process as it's run, operate remotely, program or communicate across a LAN or the Internet. The software, which is supplied at no additional cost, allows the operator to create virtual process simulations even beyond the hardware actually installed spin processor, in effect, letting them try it before they commit to a process. All HL Series systems can be upgraded or re-purposed without return to the factory with simple plug-in modules, either actually or virtually, and can contain a virtually unlimited number of processes and steps.

A Brief Description: The housing for this system is typically made from a solid co-polymer blend exclusive to Laurell Technologies. Unlike pure Natural Polypropylene, this material is able to resist solvents and strong acids and bases. Samples are available for testing and verification upon request. A solid PTFE Hostaflon® TFM-1600 / Teflon® AF housing is available (popular for high temperature chemistry and sub-micron particle studies).

Laurell's unique internal bowl design eliminates splash back, making it unnecessary to install "splash rings." Our large Adjustable Down-Flow Exhaust & Drain separates vapors, which are exhausted upward, from liquids, which are drained downward, and includes an adjustable control valve to fine-tune exhaust flow.

The closed bowl design, coupled with the precision of the process controller, allows most coating materials to dry in a quiescent state, increasing uniformity and minimizing particle contamination. The upper plenum closes inside the base to provide an overlapping seal, and the inside of the lid has a special gutter to channel fluid to the rear of the system to discourage chemicals from accidentally dripping onto the substrate.

A proprietary labyrinth seal protects the motor and control electronics from chemical contamination. This seal provides the process chamber with Nitrogen purge and has been proven to be particle-free on a sub-micron level during field testing. The system's clear top is made from ECTFE (unless otherwise stated), and only ECTFE-coated 316 stainless steel screws are used in some non-wetted areas throughout the system.

For more information, see HL Series Spin Coater.

Operator and System Safety

Safety

Complete electrical isolation from the operator, fool-proof door interlock, and ETL certification, UL, and CSA approval of components assure many years of safe, trouble-free performance. Interlocks prevent rotation when the vacuum switch has not been engaged and when the lid is open. All Laurell systems are CE and RoHS compliant, and all certificates are sent with each system. For more information, please visit the Safety page.

Process Safeguard

The "process safeguard" feature of all Laurell process controllers ensures that the same process cannot inadvertently be run on the same substrate. This feature can easily be bypassed to run the same process again without opening the system or a sequence can be run over and over (looping).

Required Facilities

N2 Process/Seal Purge: 60–70 PSIG (4–5 bar) of Nitrogen/CDA is required to pressurize the labyrinth-type motor seal. This gas also purges the process chamber. The gas consumption is very low, at 3 cubic feet per hour (0.085 m3/hour). 10 feet (300 cm) of 3/16 inch (~4 mm) inside diameter X 1/4 inch (~6 mm) outside diameter PE tubing is provided.

Vacuum: 25–28 inches (~635–711mm) Hg of vacuum with a flow volume of 4.5 SCFM (0.127 cubic meters/minute) at 0 inches Hg is suggested. 10 feet (300 cm) of 3/8 inch (~9.5 mm) outside diameter X 1/4 inch (~6 mm) inside diameter PE tubing is provided.

Power: 95 to 240VAC, 47/63HZ, ~300 Watts

Processes supported

The HL Series is typically employed in glove boxes for Solvent, Base or Acid-based processing: Coating, Etching, Developing, Rinsing-Drying and Cleaning. While all of these process are supported, Laurell recommends single-use only, due to known material conflicts. For example, Photoresist and Developer (cross-contamination), and SC-1 & SC-2 (HCl + NH4OH), creating NH4Cl, a hazardous inhalation risk. Many dispense options, both manual and automatic, are available.

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